Beam diagnostic techniques for a small‐size high‐efficiency radio‐frequency ion source

The use of both a small discharge volume and magnetic mirror fields allow sequential ionization and an increased efficiency of this ion source. The extracted ion current can reach 12 mA at an extraction voltage=3 kV and discharge pressure=20 mTorr. In this paper a description of the techniques which...

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Bibliographic Details
Published in:Review of scientific instruments 1995-12, Vol.66 (12), p.5419-5422
Main Author: Zakhary, S. G.
Format: Article
Language:English
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Summary:The use of both a small discharge volume and magnetic mirror fields allow sequential ionization and an increased efficiency of this ion source. The extracted ion current can reach 12 mA at an extraction voltage=3 kV and discharge pressure=20 mTorr. In this paper a description of the techniques which are used for measuring the important parameters to evaluate this ion source is presented. These parameters are: beam profile, beam emittance, energy spread, and charge spectra of the beam. The source is found to have a beam emittance of 150 mm m rad, and energy spread of 30–60 eV, and a content of Ar+4 reaching ≂20% of the total extracted ion current.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1146062