Praseodymium alloy ion source for focused ion beam implantation in superconductors

We have investigated the emission characteristics of a liquid alloy ion source for focused ion beam implantation of praseodymium (Pr) ions in high‐T c superconductors. The element Pr was used in a ternary Au–Si–Pr alloy with a low melting point and a low vapour pressure. The melting properties of th...

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Bibliographic Details
Published in:Review of Scientific Instruments 1996-03, Vol.67 (3), p.1015-1017
Main Authors: Machalett, F., Seidel, P., Mühle, R.
Format: Article
Language:English
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Summary:We have investigated the emission characteristics of a liquid alloy ion source for focused ion beam implantation of praseodymium (Pr) ions in high‐T c superconductors. The element Pr was used in a ternary Au–Si–Pr alloy with a low melting point and a low vapour pressure. The melting properties of the alloy were determined by differential thermal analysis. We have measured the emission current stability, the current–voltage characteristics and the mass spectra using a single magnetic mass spectrometer. The ion source exhibits a good performance even after storage for several months in air. The mass spectra show a high intensity of double charged Pr ions.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1146801