Modified arc ion source of multicharged ions of metals and gases

In the ion source described here, a heated 1500 °C discharge chamber was used and a special configuration of crossed E×B fields, thereby providing several times more ion-beam current. The design of this multicharged ion source has been developed to work for long periods and use moderate power in con...

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Bibliographic Details
Published in:Review of Scientific Instruments 1998-02, Vol.69 (2), p.849-851
Main Authors: Il’enko, B. P., Nekludov, I. M., Onishchenko, I. N.
Format: Article
Language:English
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Description
Summary:In the ion source described here, a heated 1500 °C discharge chamber was used and a special configuration of crossed E×B fields, thereby providing several times more ion-beam current. The design of this multicharged ion source has been developed to work for long periods and use moderate power in continuous operation.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1148643