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Modified arc ion source of multicharged ions of metals and gases
In the ion source described here, a heated 1500 °C discharge chamber was used and a special configuration of crossed E×B fields, thereby providing several times more ion-beam current. The design of this multicharged ion source has been developed to work for long periods and use moderate power in con...
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Published in: | Review of Scientific Instruments 1998-02, Vol.69 (2), p.849-851 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
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cited_by | cdi_FETCH-LOGICAL-c299t-647092a771f203668003bfbe2d4ac7457c6f3b13ceb928b89fba78c7e1ba01573 |
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container_end_page | 851 |
container_issue | 2 |
container_start_page | 849 |
container_title | Review of Scientific Instruments |
container_volume | 69 |
creator | Il’enko, B. P. Nekludov, I. M. Onishchenko, I. N. |
description | In the ion source described here, a heated 1500 °C discharge chamber was used and a special configuration of crossed
E×B
fields, thereby providing several times more ion-beam current. The design of this multicharged ion source has been developed to work for long periods and use moderate power in continuous operation. |
doi_str_mv | 10.1063/1.1148643 |
format | article |
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identifier | ISSN: 0034-6748 |
ispartof | Review of Scientific Instruments, 1998-02, Vol.69 (2), p.849-851 |
issn | 0034-6748 1089-7623 |
language | eng |
recordid | cdi_scitation_primary_10_1063_1_1148643 |
source | AIP Digital Archive; AIP Journals (American Institute of Physics) |
title | Modified arc ion source of multicharged ions of metals and gases |
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