Optical beam deflection noncontact atomic force microscope optimized with three-dimensional beam adjustment mechanism

We present a design and performance of an optical beam deflection noncontact atomic force microscope (nc–AFM). The optical deflection detection system can be optimized by the three-dimensional beam position adjustment mechanism (the slider which mounts laser diode module, the spherical rotors with m...

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Bibliographic Details
Published in:Review of scientific instruments 2000-01, Vol.71 (1), p.128-132
Main Authors: Yokoyama, Kousuke, Ochi, Taketoshi, Uchihashi, Takayuki, Ashino, Makoto, Sugawara, Yasuhiro, Suehira, Nobuhito, Morita, Seizo
Format: Article
Language:English
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Summary:We present a design and performance of an optical beam deflection noncontact atomic force microscope (nc–AFM). The optical deflection detection system can be optimized by the three-dimensional beam position adjustment mechanism (the slider which mounts laser diode module, the spherical rotors with mirror and the cylinder which mounts quadrant photodiode) using inertial stepping motors in an ultrahigh vacuum (UHV). The samples and cantilevers are easily exchanged in UHV. The performance of the instrument is demonstrated with the atomically resolved nc-AFM images for various surfaces such as Si(111)7×7 , Cu(111) , TiO 2 (110) , and thymine/highly oriented pyrolytic graphite.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1150174