High bandwidth nano-positioner: A robust control approach

This article presents the design, identification, and control of a nano-positioning device suited to image biological samples as part of an atomic force microscope. The device is actuated by a piezoelectric stack and its motion is sensed by a linear variable differential transformer. It is demonstra...

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Bibliographic Details
Published in:Review of scientific instruments 2002-09, Vol.73 (9), p.3232-3241
Main Authors: Salapaka, S., Sebastian, A., Cleveland, J. P., Salapaka, M. V.
Format: Article
Language:English
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Summary:This article presents the design, identification, and control of a nano-positioning device suited to image biological samples as part of an atomic force microscope. The device is actuated by a piezoelectric stack and its motion is sensed by a linear variable differential transformer. It is demonstrated that the conventional proportional-integral control architecture does not meet the bandwidth requirements for positioning. The design and implementation of an H ∞ controller demonstrates substantial improvements in the positioning speed and precision, while eliminating the undesirable nonlinear effects of the actuator. The characterization of the resulting device in terms of bandwidth, resolution, and repeatability provided illustrates the effectiveness of the modern robust control paradigm.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1499533