High-temperature bulge-test setup for mechanical testing of free-standing thin films

We developed a bulge-test setup which enables measurement of the elastic and plastic properties of free-standing thin film samples between room temperature and at least 300 °C. Mechanical stress is applied to the film by a differential gas pressure across the sample and the bulge height is measured...

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Bibliographic Details
Published in:Review of scientific instruments 2003-03, Vol.74 (3), p.1383-1385
Main Authors: Kalkman, A. J., Verbruggen, A. H., Janssen, G. C. A. M.
Format: Article
Language:English
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Summary:We developed a bulge-test setup which enables measurement of the elastic and plastic properties of free-standing thin film samples between room temperature and at least 300 °C. Mechanical stress is applied to the film by a differential gas pressure across the sample and the bulge height is measured by a scanning laser beam technique. To prevent sample oxidation the pressure cell containing the sample is mounted in a vacuum chamber. The correct operation of the setup is demonstrated by measurement of the thermal expansion of free-standing Al films. Creep experiments and tensile tests demonstrate measurement of the plastic deformation of these films at temperatures up to 200 °C.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1539901