A Simple Ion Source for Implantation Doping of Semiconductors

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1970-01, Vol.41 (11), p.1677-1678
Main Authors: Gwozdz, P. S., Koehler, J. S.
Format: Article
Language:English
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1684386