Indication of Hardness of Thin Dielectric Films

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Bibliographic Details
Published in:Review of scientific instruments 1966-03, Vol.37 (3), p.368-369
Main Author: Raffalovich, Aubrey J.
Format: Article
Language:English
Online Access:Get full text
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ISSN:0034-6748
1089-7623
DOI:10.1063/1.1720182