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Microwave dielectric relaxation of the polycrystalline ( Ba , Sr ) Ti O 3 thin films
The microwave dielectric properties of the ( Ba , Sr ) Ti O 3 thin films annealed at various oxygen pressures ranging from 5 to 500 mTorr were investigated over the frequency range 0.5 - 5 GHz using a circular-patch capacitor geometry. The dielectric constant ( ε ) followed Curie-von Schweidler rela...
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Published in: | Applied physics letters 2005-04, Vol.86 (18), p.182904-182904-3 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | The microwave dielectric properties of the
(
Ba
,
Sr
)
Ti
O
3
thin films annealed at various oxygen pressures ranging from
5
to
500
mTorr
were investigated over the frequency range
0.5
-
5
GHz
using a circular-patch capacitor geometry. The dielectric constant
(
ε
)
followed Curie-von Schweidler relaxation in the microwave-frequency range, and the degree of relaxation corresponded qualitatively with the measured dielectric loss
(
tan
δ
)
. As the oxygen pressure varied, the dielectric loss had a maximum value of
∼
0.03
at
100
mTorr
, and its behavior was correlated with the Raman strength of the polar modes. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1923760 |