Femtosecond pulse shaping using a liquid-crystal display: Applicationsto depth profiling analysis

We report on a beam shaping technique for femtosecond laser pulses based on a liquid-crystal display. The system is capable of modifying femtosecond Gaussian beams to a flattop beam. A pattern projected onto liquid-crystal display modifies the incoming Gaussian beam intensity so that flattop intensi...

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Bibliographic Details
Published in:Review of scientific instruments 2005-08, Vol.76 (8), p.086104-086104-3
Main Authors: Samek, Ota, Hommes, Vanja, Hergenröder, Roland, Kukhlevsky, Sergei V.
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Summary:We report on a beam shaping technique for femtosecond laser pulses based on a liquid-crystal display. The system is capable of modifying femtosecond Gaussian beams to a flattop beam. A pattern projected onto liquid-crystal display modifies the incoming Gaussian beam intensity so that flattop intensity profile is obtained. The process is monitored online using a charge-coupled device camera so that the intensity distribution of each pulse is known. An experimental example of the depth profile of a Cr layer on a Si substrate obtained using such a modified beam is presented.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1994897