Ultrasensitive mass sensor fully integrated with complementarymetal-oxide-semiconductor circuitry

Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions an...

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Bibliographic Details
Published in:Applied physics letters 2005-07, Vol.87 (4), p.043507-043507-3
Main Authors: Forsen, E., Abadal, G., Ghatnekar-Nilsson, S., Teva, J., Verd, J., Sandberg, R., Svendsen, W., Perez-Murano, F., Esteve, J., Figueras, E., Campabadal, F., Montelius, L., Barniol, N., Boisen, A.
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Summary:Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air. A mass sensitivity of 4 ag ∕ Hz has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1999838