Time-resolved measurements of Cl 2 density in high-densityplasmas and application

Absorption at 355 nm, with a pulsed frequency tripled yttrium-aluminum-garnet laser as light source, is used to monitor the time evolution of the Cl 2 density in high-density inductively coupled plasmas. The detection limit over a 0.1 s acquisition time is about 0.2 mTorr of Cl 2 . This technique is...

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Bibliographic Details
Published in:Applied physics letters 2006-02, Vol.88 (5), p.051501-051501-3
Main Authors: Cunge, Gilles, Mori, Masahito, Kogelschatz, Martin, Sadeghi, Nader
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Summary:Absorption at 355 nm, with a pulsed frequency tripled yttrium-aluminum-garnet laser as light source, is used to monitor the time evolution of the Cl 2 density in high-density inductively coupled plasmas. The detection limit over a 0.1 s acquisition time is about 0.2 mTorr of Cl 2 . This technique is well suited for monitoring chlorine density when studying elementary processes in Cl 2 containing plasmas. Furthermore, it can be applied to control the process drift in industrial etch reactors resulting from the modification of the chamber walls conditions: by measuring the Cl 2 density in a reference Cl 2 plasma before etching a wafer, it can be determined if the chamber wall conditions are kept identical from one wafer to another.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2171768