Design of a femtosecond laser assisted tomographic atom probe

A tomographic atom probe (TAP) in which the atoms are field evaporated by means of femtosecond laser pulses has been designed. It is shown that the field evaporation is assisted by the laser field enhanced by the subwavelength dimensions of the specimen without any significant heating of the specime...

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Bibliographic Details
Published in:Review of scientific instruments 2006-04, Vol.77 (4), p.043705-043705-8
Main Authors: Gault, B., Vurpillot, F., Vella, A., Gilbert, M., Menand, A., Blavette, D., Deconihout, B.
Format: Article
Language:English
Subjects:
ATOMS
DESIGN
ELECTRIC FIELDS
EVAPORATION
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ION MICROSCOPY
LASER RADIATION
LASERS
MASS RESOLUTION
Physics
PROBES
PULSES
SILICON
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Summary:A tomographic atom probe (TAP) in which the atoms are field evaporated by means of femtosecond laser pulses has been designed. It is shown that the field evaporation is assisted by the laser field enhanced by the subwavelength dimensions of the specimen without any significant heating of the specimen. In addition, as compared with the conventional TAP, due to the very short duration of laser pulses, no spread in the energy of emitted ions is observed, leading to a very high mass resolution in a straight TAP in a wide angle configuration. At last, laser pulses can be used to bring the intense electric field required for the field evaporation on poor conductive materials such as intrinsic Si at low temperature. In this article, the performance of the laser TAP is described and illustrated through the investigation of metals, oxides, and silicon materials.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.2194089