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Enhancement of extreme ultraviolet emission from a lithiumplasma by use of dual laser pulses
We demonstrated enhancement of extreme ultraviolet (EUV) emission at 13.5 nm from a lithium plasma by use of dual laser pulses. A single laser pulse produced a lithium plasma condition for the EUV emission far beyond its optimum. Utilization of dual laser pulses, however, enhanced the EUV emission e...
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Published in: | Applied physics letters 2006-04, Vol.88 (16), p.161502-161502-3 |
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Main Authors: | , , , |
Format: | Article |
Language: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | We demonstrated enhancement of extreme ultraviolet (EUV) emission at
13.5
nm
from a lithium plasma by use of dual laser pulses. A single laser pulse produced a lithium plasma condition for the EUV emission far beyond its optimum. Utilization of dual laser pulses, however, enhanced the EUV emission energy, and its maximum in-band EUV conversion efficiency (CE) in a measured solid angle was observed to be 2.4% at a pulse separation time between 20 and
50
ns
. The EUV CE became 1.8 times as large as that produced by a single laser pulse, which was one of the highest values ever reported. Enhancement of the EUV CE was attributed to the decrease of the plasma temperature and density to their optimum values. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2195904 |