Ca test of Al 2 O 3 gas diffusion barriers grown by atomic layerdeposition on polymers

Quantitative Ca tests were used to determine the water vapor transmission rate (WVTR) through 25 nm thick Al 2 O 3 gas diffusion barriers grown on plastic by atomic layer deposition (ALD). The measured WVTRs were 1.7 × 10 − 5 g ∕ m 2 day at 38 ° C and 6.5 × 10 − 5 g ∕ m 2 day at 60 ° C . Based on th...

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Bibliographic Details
Published in:Applied physics letters 2006-07, Vol.89 (3), p.031915-031915-3
Main Authors: Carcia, P. F., McLean, R. S., Reilly, M. H., Groner, M. D., George, S. M.
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Summary:Quantitative Ca tests were used to determine the water vapor transmission rate (WVTR) through 25 nm thick Al 2 O 3 gas diffusion barriers grown on plastic by atomic layer deposition (ALD). The measured WVTRs were 1.7 × 10 − 5 g ∕ m 2 day at 38 ° C and 6.5 × 10 − 5 g ∕ m 2 day at 60 ° C . Based on the apparent activation energy, the WVTR at 23 ° C is estimated to be only 6 × 10 − 6 g ∕ m 2 day . The WVTR values for the Al 2 O 3 ALD film are very similar to the WVTR value for the glass control. These Ca tests indicate that Al 2 O 3 ALD gas diffusion barriers should enable display and lighting applications of highly moisture sensitive organic light-emitting diodes on plastic.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2221912