Low-loss planar and stripe waveguides in Nd 3 + -doped silicate glass produced by oxygen-ion implantation

• Published in: Journal of applied physics 2007-03, Vol.101 (5), p.053112-053112-4
• Main Authors: Wang, Lei, Chen, Feng, Wang, Xue-Lin, Wang, Ke-Ming, Jiao, Yang, Wang, Liang-Ling, Li, Xi-Shan, Lu, Qing-Ming, Ma, Hong-Ji, Nie, Rui
• Format: Article
• ISSN: 0021-8979; 1089-7550
• DOI: 10.1063/1.2710293

We report on the fabrication and characterization of low-loss planar and stripe waveguides in a Nd 3 + -doped glass by 6 MeV oxygen-ion implantation at a dose of 1 × 10 15 ions ∕ cm 2 . The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. The refractive index profile of the planar waveguide was reconstructed from a code based on the reflectivity calculation method. The results indicate that a refractive index enhanced region as well as an optical barrier have been created after the ion beam processing. The near-field mode profiles of the stripe waveguide were obtained by an end-fire coupling arrangement, by which three quasitransverse electric modes were observed. After annealing, the propagation losses of the planar and stripe waveguides were reduced to be ∼ 0.5 and ∼ 1.8 dB ∕ cm , respectively.