Side extraction duoPIGatron-type ion sourcea

We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in which ions are extracted from a side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1 × 40 mm 2 . The ion so...

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Bibliographic Details
Published in:Review of scientific instruments 2008-02, Vol.79 (2)
Main Authors: Gushenets, V. I., Oks, E. M., Hershcovitch, Ady, Johnson, B. M.
Format: Article
Language:English
Online Access:Get full text
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Summary:We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in which ions are extracted from a side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1 × 40 mm 2 . The ion source was developed to study physical and technological aspects relevant to an industrial ion source. The side extraction duoPIGatron has a stable arc, uniformly bright illumination, and dense plasma. The present work describes some operating parameters of the ion source using argon and B F 3 . Total unanalyzed beam currents were 40 mA with Ar at an arc current of 7 A and 13 mA with B F 3 gas at an arc current of 9 A .
ISSN:0034-6748
1089-7623
DOI:10.1063/1.2802286