High-gravity-assisted pulsed laser ablation system for the fabricationof functionally graded material thin film

• Published in: Review of scientific instruments 2009-03, Vol.80 (3), p.033904-033904-6
• Main Authors: Nishiyama, T., Morinaga, S., Nagayama, K.
• Format: Article
• ISSN: 0034-6748; 1089-7623
• DOI: 10.1063/1.3095559

This paper describes a novel method for the fabrication of a thin film deposited on an appropriate substrate having a continuous composition gradient. The composition gradient was achieved by a combination of pulsed laser ablation (PLA) of the target material with a very strong acceleration field generated on a moving disk rotating at a very high speed. The PLA process was used to produce a cloud of high-energy particles of the target material that will be deposited on a substrate placed on the rotating disk. After deposition, the particles will diffuse on the surface of the thin film under a strong acceleration field. The high energy of the particles and their diffusion on the substrate surface in a high-vacuum environment produces a macroscopic composition distribution in the thin film. We have constructed an experimental apparatus consisting of a vacuum chamber in which a circular disk made of titanium is driven by a high-frequency inductive motor. An acceleration field of up to 10000 G can be generated by this apparatus. Functionally graded material thin films of FeSi 2 with a continuous concentration gradient were successfully fabricated by this method under a gravity field of 5400 G. A significant advantage of this method is that it allows us to fabricate graded thin films with a very smooth surface covered by few droplets.