Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings

The mechanical response of optical multilayer dielectric (MLD) diffraction gratings has been studied using nanoindentation. The results are interpreted using a stress-strain model, which reveals a uniaxial yield stress of 4.1 GPa. It is shown that the indentation response of the high-aspect ratio “p...

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Bibliographic Details
Published in:AIP advances 2011-12, Vol.1 (4), p.042179-042179-5
Main Authors: Mehrotra, K., Howard, H. P., Jacobs, S. D., Lambropoulos, J. C.
Format: Article
Language:English
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Summary:The mechanical response of optical multilayer dielectric (MLD) diffraction gratings has been studied using nanoindentation. The results are interpreted using a stress-strain model, which reveals a uniaxial yield stress of 4.1 GPa. It is shown that the indentation response of the high-aspect ratio “pillar” geometry (constrained in one transverse direction but free in the other) can be expressed in terms of yield stress rather than material hardness.
ISSN:2158-3226
2158-3226
DOI:10.1063/1.3673070