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Improved performance of non-volatile memory with Au-Al 2 O 3 core-shell nanocrystals embedded in HfO 2 matrix
In this paper, we demonstrate a charge trapping memory with Au-Al 2 O 3 core-shell nanocrystals (NCs) embedded in HfO 2 high-k dielectric. Transmission electron microscopy images clearly show the Au NCs surrounded by Al 2 O 3 shells in the HfO 2 matrix. Electrical measurements show a considerable me...
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Published in: | Applied physics letters 2012-05, Vol.100 (20), p.203509-203509-4 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | In this paper, we demonstrate a charge trapping memory with Au-Al
2
O
3
core-shell nanocrystals (NCs) embedded in HfO
2
high-k dielectric. Transmission electron microscopy images clearly show the Au NCs surrounded by Al
2
O
3
shells in the HfO
2
matrix. Electrical measurements show a considerable memory window (3.6V at ±8V), low program/erase operation voltages, and good endurance. Particularly, data retention is improved both at room temperature and high temperature compared to the NC structure without shell. An energy band model is given for the improved retention characteristic. This Au-Al
2
O
3
core-shell NCs memory device has a strong potential for future high-performance nonvolatile memory application. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4720085 |