Investigation of switching region in superlattice phase change memories

We investigated superlattice phase change memories (PCMs) to clarify which regions were responsible for switching. We observed atomic structures in a superlattice PCM film with a stack of GeTe / Sb2Te3 layers using atomically resolved EDX maps, and we found an intermixed region with three atom speci...

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Bibliographic Details
Published in:AIP advances 2016-10, Vol.6 (10), p.105104-105104-8
Main Authors: Ohyanagi, T., Takaura, N.
Format: Article
Language:English
Subjects:
Antimony
Phase change
Phase transitions
Superlattices
Switching
Tellurium
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Summary:We investigated superlattice phase change memories (PCMs) to clarify which regions were responsible for switching. We observed atomic structures in a superlattice PCM film with a stack of GeTe / Sb2Te3 layers using atomically resolved EDX maps, and we found an intermixed region with three atom species of the Ge, Sb and Te around the top GeTe layer under the top electrode. We also found that a device with a GeTe layer on an Sb2Te3 layer without superlattice structure had the same switching characteristics as a device with a superlattice PCM, that had the same top GeTe layer. We developed and fabricated a modified superlattice PCM that attained ultra low Reset / Set currents under 60 μ A .
ISSN:2158-3226
2158-3226
DOI:10.1063/1.4964729