Molecular-viscous vacuum pump (MVVP)

In this study, the principle of operation of the new type of vacuum pumps - molecular-viscous vacuum pump (MVVP), that provides vacuum system evacuation in a wide pressure range, - is described. Despite such a wide range of operation of the pump, the main area of it’s application is the molecular-vi...

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Bibliographic Details
Main Authors: Svichkar, E. V., Nikulin, N. K., Klyucharov, V. S., Demikhov, K. E.
Format: Conference Proceeding
Language:English
Subjects:
Atmospheric pressure
Evacuation systems
Gas flow
Parameters
Vacuum pumps
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Summary:In this study, the principle of operation of the new type of vacuum pumps - molecular-viscous vacuum pump (MVVP), that provides vacuum system evacuation in a wide pressure range, - is described. Despite such a wide range of operation of the pump, the main area of it’s application is the molecular-viscous regime of gas flow, also called the transition regime of gas flow. Comparison of the developed vacuum pump with two-rotor pumps and vortex pump with the same geometric parameters allows one to conclude the qualitative operating of the pump and the higher evacuating parameters in the studied pressure range.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4998878