Thermally tunable VO2-SiO2 nanocomposite thin-film capacitors

We present a study of co-sputtered VO2-SiO2 nanocomposite dielectric thin-film media possessing continuous temperature tunability of the dielectric constant. The smooth thermal tunability is a result of the insulator-metal transition in the VO2 inclusions dispersed within an insulating matrix. We pr...

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Bibliographic Details
Published in:Journal of applied physics 2018-03, Vol.123 (11)
Main Authors: Sun, Yifei, Narayanachari, K. V. L. V., Wan, Chenghao, Sun, Xing, Wang, Haiyan, Cooley, Kayla A., Mohney, Suzanne E., White, Doug, Duwel, Amy, Kats, Mikhail A., Ramanathan, Shriram
Format: Article
Language:English
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Summary:We present a study of co-sputtered VO2-SiO2 nanocomposite dielectric thin-film media possessing continuous temperature tunability of the dielectric constant. The smooth thermal tunability is a result of the insulator-metal transition in the VO2 inclusions dispersed within an insulating matrix. We present a detailed comparison of the dielectric characteristics of this nanocomposite with those of a VO2 control layer and of VO2/SiO2 laminate multilayers of comparable overall thickness. We demonstrated a nanocomposite capacitor that has a thermal capacitance tunability of ∼60% between 25 °C and 100 °C at 1 MHz, with low leakage current. Such thermally tunable capacitors could find potential use in applications such as sensing, thermal cloaks, and phase-change energy storage devices.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.5011641