Correlation of electrical characteristics with interface chemistry and structure in Pt/Ru/PbZr0.52Ti0.48O3/Pt capacitors after post metallization annealing

We report the effect of post-metallization annealing (PMA) on the electrical behavior of Pt/Ru/PbZr0.52Ti0.48O3(PZT)/Pt capacitors and correlations with the physical chemistry of the top electrode/PZT interface. PMA improves the electrical characteristics, in particular the breakdown field while ind...

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Bibliographic Details
Published in:Applied physics letters 2018-09, Vol.113 (13)
Main Authors: Gueye, Ibrahima, Le Rhun, Gwenael, Renault, Olivier, Cooper, David, Defay, Emmanuel, Barrett, Nicholas
Format: Article
Language:English
Subjects:
Annealing
Applied physics
Capacitors
Electrodes
Lead
Metallizing
Organic chemistry
Physical chemistry
Ruthenium
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Summary:We report the effect of post-metallization annealing (PMA) on the electrical behavior of Pt/Ru/PbZr0.52Ti0.48O3(PZT)/Pt capacitors and correlations with the physical chemistry of the top electrode/PZT interface. PMA improves the electrical characteristics, in particular the breakdown field while inducing important chemical and structural modifications at the interface. The Ru electrode layer is oxidized and disrupted. There is evidence for the formation of RuOx and ZrRuOx metallic phases at the interface but no Pb transport into the electrode region is observed.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.5041767