The composition and structure of gradient layered coatings: Doped titanium nitride – Dispersion strengthened amorphous carbon

By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the stru...

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Bibliographic Details
Main Authors: Ovchinnikov, Stanislav, Slabodchikov, Vladimir, Kuznetsov, Vladimir
Format: Conference Proceeding
Language:English
Subjects:
Aluminum
Carbon
Coatings
Composition
Copper
Magnetron sputtering
Silicon
Titanium carbide
Titanium nitride
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Summary:By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.5132125