A novel method of silicon synthesis by CVD

Silicon fibers were synthesized by a novel CVD method including in the interaction of aluminum monofluoride with silicon oxide, the final product containing nanofibers in an amount of 15 wt. %. The possibility of selective reduction of silicon oxide from the chamotte refractory plate was also demons...

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Bibliographic Details
Main Authors: Shishkin, R. A., Kudyakova, V. S., Yuferov, Yu. V., Zykov, F. M.
Format: Conference Proceeding
Language:English
Subjects:
Aluminum
Chamotte
Nanofibers
Product design
Refractory materials
Silicon
Silicon oxides
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Description
Summary:Silicon fibers were synthesized by a novel CVD method including in the interaction of aluminum monofluoride with silicon oxide, the final product containing nanofibers in an amount of 15 wt. %. The possibility of selective reduction of silicon oxide from the chamotte refractory plate was also demonstrated. Si was characterized by SEM and XRD. Thermodynamics and mechanism of silicon fiber formation were also considered.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.5134214