The effect of the Q factor on the air humidity in the microcantilever sensorocantilever sensor

• Main Authors: Budi, Agus Setyo, Nasbey, Hadi, Rinaldy, Dina Ramadhini, Nuryadi, Ratno, Mayasari, Rina Dewi, Mulyono, Aditya Eka, Pradana, Yuwana
• Format: Conference Proceeding
• Language: English
• Subjects: Chambers; Humidity; Q factors; Resonant frequencies; Sensitivity; Sensors; Water chemistry
• ISSN: 0094-243X; 1551-7616
• DOI: 10.1063/5.0045338

The microcantilever sensor is one of the most generally studied and learned sensors currently on the fields of chemistry, biology, health and environmental factors such as temperature, humidity, sound and pressure. This is because the microcantilever sensor has a high sensitivity to the attogram scale (10−18). The Q factor of the microcantilever sensor illustrates the sensitivity of the sensor. This research was carried out in 48% and 55% humidity variations with the chamber opened and closed. The results showed that the higher of humidity, degrades the Q factor in the microcantilever sensor. The average value of the Q factor when chamber was opened at 48% humidity was 285.2 and 240.9 at 55%. When the chamber is closed at the 48% of humidity has an average Q factor in 266.7 and 243.3 at 55%. This is due to water molecules attached to the microcantilever sensor when humidity is high causes a decrease of the resonant frequency in the microcantilever sensor where the Q factor has an equal value to the resonance frequency.