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Sequencing and identification TOF-SIMS analysis on D9 alloy
We present a method for the clear identification of materials using a TOF-SIMS. TOF-SIMS method whereby the accurate and reproducible chemical depth distributions of atomic and molecular surface analysis identification on the nanometer scale. TOF-SIMS depth profiles was demonstrated with the PHI TRI...
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Main Authors: | , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | We present a method for the clear identification of materials using a TOF-SIMS. TOF-SIMS method whereby the accurate and reproducible chemical depth distributions of atomic and molecular surface analysis identification on the nanometer scale. TOF-SIMS depth profiles was demonstrated with the PHI TRIFT V nano TOF using a Ga+ cluster LMIG to observe the structure of a spontaneously identified elements of D9 alloy. The high sensitivity of nano TOF’s TRIFT analyzer, combined with new ion beam Technologies for nondestructive molecular depth profiling, enables 2D visualization of molecular structures compared with depth profile for PA techniques. |
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ISSN: | 0094-243X 1551-7616 |
DOI: | 10.1063/5.0103629 |