Modeling of sensitive elements of capacitive measuring transducers taking into account the influence of the edge electrostatic effect

Capacitive sensors are very attractive for various fields of science and technology. This is due to such advantages as minimal power consumption, high sensitivity, increased noise immunity, etc. On the other hand, these advantages can be achieved by precision machining of the sensor parts. In additi...

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Bibliographic Details
Published in:AIP conference proceedings 2022-10, Vol.2503 (1)
Main Author: Mikhailov, P. G.
Format: Article
Language:English
Subjects:
Noise sensitivity
Power consumption
Precision machining
Sensors
Transducers
Online Access:Get full text
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Summary:Capacitive sensors are very attractive for various fields of science and technology. This is due to such advantages as minimal power consumption, high sensitivity, increased noise immunity, etc. On the other hand, these advantages can be achieved by precision machining of the sensor parts. In addition, when developing capacitive sensors, it is necessary to take into account and compensate for their specific phenomena. In particular, such problems include edge electrostatic effects, which can reduce the temporal and parametric stability of the sensors
ISSN:0094-243X
1551-7616
DOI:10.1063/5.0119556