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Effect of mixing CF4 with O2 on electron characteristics of capacitively coupled plasma
Effect of mixing CF4 with O2 on electron parameters in capacitively coupled RF plasma was studied. Adding CF4 gas to fixed O2 flow, electron energy probability functions were measured by a Langmuir probe method. As the CF4 gas was added, the decrease in the probability of low energy electrons was ob...
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Published in: | Physics of plasmas 2023-01, Vol.30 (1) |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Effect of mixing CF4 with O2 on electron parameters in capacitively
coupled RF plasma was studied. Adding CF4 gas to fixed O2 flow,
electron energy probability functions were measured by a Langmuir probe method. As the
CF4 gas was added, the decrease in the probability of low energy electrons
was observed. The proportion of low energy electrons decreased gradually as the
CF4 gas ratio increased, respectively. From electron energy probability
functions, electron densities and electron temperatures were calculated. As the
CF4 gas ratio increased, electron density decreased and electron temperature
increased. Collision cross sections of low energy electrons can explain electron parameter
behaviors. By the strong electron attachment of fluorine species which were generated from
CF4, low energy electrons depleted by attachment, and the overall electron
temperature increased. However, as the elastic collision cross section of CF4
is not different from that of O2, the heating mechanism and physics of high
energy electrons did not change. |
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ISSN: | 1070-664X 1089-7674 |
DOI: | 10.1063/5.0120850 |