Sensing performance of sub-100-nm vanadium oxide films for room temperature thermal detection applications

Vanadium oxide films are widely employed as thermal detectors in uncooled infrared detection systems due to their high temperature coefficient of resistance near room temperature. One strategy toward maximizing detectivity and reducing the thermal time constant in these systems is to minimize the sy...

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Bibliographic Details
Published in:Applied physics letters 2022-11, Vol.121 (20)
Main Authors: Scott, Ethan A., Singh, Manish K., Barber, John P., Rost, Christina M., Ivanov, Sergei, Watt, John, Pete, Douglas, Sharma, Peter, Lu, Tzu-Ming, Harris, C. Thomas
Format: Article
Language:English
Subjects:
Applied physics
High temperature
Infrared detectors
Oxide coatings
Room temperature
Thickness
Thin films
Time constant
Vanadium oxides
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Summary:Vanadium oxide films are widely employed as thermal detectors in uncooled infrared detection systems due to their high temperature coefficient of resistance near room temperature. One strategy toward maximizing detectivity and reducing the thermal time constant in these systems is to minimize the system platform dimensions. This approach necessitates thinner film thicknesses ( ≪100 nm), for which there is little information regarding thermal sensing performance. Herein, we report on the sensitivity of reactively sputtered vanadium oxide thin film resistive thermometers nominally ranging from 100 to 25 nm and assess the influence of thermal annealing. We demonstrate that films in this minimum limit of thickness maintain a high temperature coefficient while additionally providing an enhancement in characteristics of the noise equivalent power.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0123303