Synthesis ZnO thin film by (CBD) method for humidity sensor applications

The ZnO thin films have been synthesized through interaction of ZnCl2 and NaOH by chemical bath deposition method. The prepared films were annealing at different temperatures (Ta =450, 500, 550oC). The ZnO samples were characterized by x-ray diffraction (XRD) to examine the structure of the prepared...

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Bibliographic Details
Main Authors: Jalli, Fatima S., Mohmmed, Noora Jassim, Alwan, Tariq J.
Format: Conference Proceeding
Language:English
Subjects:
Annealing
Humidity
Room temperature
Sensitivity enhancement
Thin films
Zinc chloride
Zinc oxide
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Summary:The ZnO thin films have been synthesized through interaction of ZnCl2 and NaOH by chemical bath deposition method. The prepared films were annealing at different temperatures (Ta =450, 500, 550oC). The ZnO samples were characterized by x-ray diffraction (XRD) to examine the structure of the prepared films and the effect of annealing on it, and found that the films have a polycrystalline structure, and this structure improves with increasing the annealing temperature through increasing the crystal size of the prepared films. When examining the sensitivity of the ZnO thin films deposited on glass to humidity, the results showed that they were sensitized at room temperature, and the sensitivity was increase and enhance with annealing and highest sensitivity of the film at annealing temperature 550oC to humidity was (70.1%).
ISSN:0094-243X
1551-7616
DOI:10.1063/5.0129293