Cutting force simulation for machining of precision vacuum component

Vacuum valves play critical roles in today’s semiconductor industries as they directly affect the quality of semiconductor chips produced. Vacuum valves are mostly made from aluminium and produced by using Computer Numerical Control (CNC) machining. Two main criteria for ensuring the machining produ...

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Bibliographic Details
Main Authors: Hamzah, Muhammad Al Amien, Abdullah, Jamaluddin, Shaari, Mohd Shakir
Format: Conference Proceeding
Language:English
Subjects:
Aluminum
Cutting force
Cutting parameters
Feed rate
Machining
Numerical controls
Process parameters
Static structural analysis
Surface properties
Taguchi methods
Valves
Variance analysis
Warpage
Workpieces
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Summary:Vacuum valves play critical roles in today’s semiconductor industries as they directly affect the quality of semiconductor chips produced. Vacuum valves are mostly made from aluminium and produced by using Computer Numerical Control (CNC) machining. Two main criteria for ensuring the machining products quality are the dimensional accuracy of the vacuum valves and its surface quality. Machining parameters especially spindle speed and feed rate are the main parameters that are affecting the products’ quality. Thus, this research is a preliminary finding to study the cutting force acting towards the aluminium workpiece behaviour during machining by using ANSYS static structural analysis. The results show that the workpiece experienced deformation during machining, leading to warpage. This was attributed to improper fixture and locator design. Further research is planned by using Taguchi method and Analysis of Variance (ANOVA) as to find the optimum value of machining parameters and which parameters is the main factors in causing the workpiece to have dimensional accuracy issue.
ISSN:0094-243X
1551-7616
DOI:10.1063/5.0188273