Structure, stability, and mechanical properties of epitaxial W/NbN superlattices

Epitaxial W/NbN superlattices with modulation wavelengths Λ ranging from 1.3 to 25 nm were grown on MgO(001) substrates by dc reactive magnetron sputtering in Ar/N 2 mixtures. The epitaxial relationship between the layers is given by W(001)‖NbN(001) and W[110]‖NbN[100]. X-ray diffraction and Rutherf...

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2001-05, Vol.19 (3), p.952-957
Main Authors: Madan, A., Barnett, S. A., Misra, A., Kung, H., Nastasi, M.
Format: Article
Language:English
Subjects:
Annealing
Computer simulation
Epitaxial growth
Hardness
Interdiffusion (solids)
Magnetron sputtering
Nanotechnology
Niobium compounds
Thin films
Tungsten
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Summary:Epitaxial W/NbN superlattices with modulation wavelengths Λ ranging from 1.3 to 25 nm were grown on MgO(001) substrates by dc reactive magnetron sputtering in Ar/N 2 mixtures. The epitaxial relationship between the layers is given by W(001)‖NbN(001) and W[110]‖NbN[100]. X-ray diffraction and Rutherford backscattering results fitted using simulations showed that the superlattices had well-defined planar layers with interface widths of ≈0.2 nm. Nanoindentation measurements showed superlattice hardnesses as high as 33 GPa compared to 8 for W and 20 for NbN. The superlattices showed little change in x-ray superlattice reflections or nanoindentation hardness after vacuum annealing up to the highest temperature tested, 1000 °C for 6 h. Thus, the layers remained intact during annealing, allowing the superlattice hardness enhancement to be retained.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.1365133