Structural, electrical, and optical properties of diamondlike carbon films deposited by dc magnetron sputtering

The electrical and optical properties of diamondlike carbon films deposited by direct current magnetron sputtering on Si substrates at room temperature have been measured as a function of the ion energy (E ion ) and ion-to-carbon flux (J ion /J C ). The results show that, in the ranges of 5  eV ⩽E i...

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2003-11, Vol.21 (6), p.L23-L27
Main Authors: Broitman, E., Lindquist, O. P. A., Hellgren, N., Hultman, L., Holloway, B. C.
Format: Article
Language:English
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Summary:The electrical and optical properties of diamondlike carbon films deposited by direct current magnetron sputtering on Si substrates at room temperature have been measured as a function of the ion energy (E ion ) and ion-to-carbon flux (J ion /J C ). The results show that, in the ranges of 5  eV ⩽E ion ⩽85  eV and 1.1⩽J ion /J C ⩽6.8, the presence of defective graphite formed by subplanted C and Ar atoms, voids, and the surface roughness, are the dominant influences on the resistivity and optical absorption.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.1617277