Surface etching of YBCO films by xenon difluoride

We have demonstrated that xenon difluoride ( Xe F 2 ) etches thin films of Y Ba 2 Cu 3 O 7 − x , the superconducting form of yttrium–barium–copper–oxide (YBCO), during dry etch processing. Both c -axis and mixed a ∕ c -axis YBCO films show evidence of such etching with a axis being more reactive. Pr...

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Bibliographic Details
Published in:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2005-07, Vol.23 (4), p.1607-1610
Main Authors: Crossley, Benjamin L., Drehman, Alvin J., Reid, James R., Derov, John S., Corrales, Alfredo A., Crisman, Everett E.
Format: Article
Language:English
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Summary:We have demonstrated that xenon difluoride ( Xe F 2 ) etches thin films of Y Ba 2 Cu 3 O 7 − x , the superconducting form of yttrium–barium–copper–oxide (YBCO), during dry etch processing. Both c -axis and mixed a ∕ c -axis YBCO films show evidence of such etching with a axis being more reactive. Profiles of YBCO films examined by ESCA show that the surfaces of both etched and unetched films are barium rich at the expense of yttrium. After Xe F 2 etching, fluorine was found to be present to a depth of at least 40 nm . Despite the etching and the presence of fluorine in the YBCO films, the superconducting transition temperature, T c , was unaffected by the Xe F 2 treatment.
ISSN:0734-211X
1071-1023
1520-8567
2327-9877
DOI:10.1116/1.1978894