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High quality of 830 nm material grown by solid source molecular beam epitaxy for laser device printing applications
Molecular beam epitaxy (MBE) has been employed almost entirely for the growth of arsenic compounds due to the lack of a suitable suitable solid phosphorous source. Advanced phosphide epitaxy has only been performed by metal organic chemical vapor deposition and phosphide based gas-source MBE. Solid...
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Published in: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2007-05, Vol.25 (3), p.926-930 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Molecular beam epitaxy (MBE) has been employed almost entirely for the growth of arsenic compounds due to the lack of a suitable suitable solid phosphorous source. Advanced phosphide epitaxy has only been performed by metal organic chemical vapor deposition and phosphide based gas-source MBE. Solid source MBE (SSMBE), however, is capable of growing GaInAsP and AlGaInP layer structures without using toxic gases as source material. The key of SSMBE in producing high quality phosphides is a valved cracker cell for elemental phosphorus and arsenic, as well as the optimization of growth conditions such as growth temperature, P cracking zone temperature,
P
∕
As
ratio,
Δ
T
between inner and outer heaters, and doping profiles. The
830
nm
material was grown in GEN III reactor on
2
in.
GaAs wafers doped with Si. Substrate growth temperature by a pyrometer was
500
°
C
, the cracker temperature was kept at
850
°
C
, and
Δ
T
at
12
°
C
. To verify the material quality, wafers were processed to make lasers with different cavity lengths and
56
μ
m
emitter widths. Internal quantum efficiency
(
η
i
)
of 95.5% and internal optical losses
(
α
i
)
of
0.47
cm
−
1
at
25
°
C
were obtained. Devices were burn in for more than
5000
h
at cw mode, indicating high reliability. |
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ISSN: | 1071-1023 1520-8567 |
DOI: | 10.1116/1.2718963 |