Effect of sample bias on backscattered ion spectroscopy in the helium ion microscope

The authors present experimental results showing the effect of an applied bias voltage on backscattered ion spectra acquired from thin films of ruthenium and hafnia in the helium ion microscope. A characteristic peak associated with the presence of a thin layer of material is observed to shift as a...

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2010-11, Vol.28 (6), p.1377-1380
Main Authors: Behan, G., Feng, J. F., Zhang, H. Z., Nirmalraj, P. N., Boland, J. J.
Format: Article
Language:English
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Summary:The authors present experimental results showing the effect of an applied bias voltage on backscattered ion spectra acquired from thin films of ruthenium and hafnia in the helium ion microscope. A characteristic peak associated with the presence of a thin layer of material is observed to shift as a function of sample bias voltage. The magnitude of this shift is measured, and the authors qualitatively estimate the composition of their samples as well as investigate the neutralization of ions by the sample in the helium ion micoscope (HeIM). They discuss the phenomenona in terms of thin films of ruthenium and hafnia and show the implications of these results on HeIM spectroscopy.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.3502667