Optimization of a self-closing effect to produce nanochannels with top slits in fused silica

• Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2012-11, Vol.30 (6)
• Main Authors: Graczyk, Mariusz, Balaz, Martina, Kvennefors, Anders, Linke, Heiner, Maximov, Ivan
• Format: Article
• Language: English
• Subjects: Annan fysik; Condensed Matter Physics; Den kondenserade materiens fysik; Engineering and Technology; Fysik; Nano Technology; Nanoteknik; Natural Sciences; Naturvetenskap; Other Physics Topics; Physical Sciences; Teknik
• ISSN: 2166-2746; 1520-8567; 1520-8567; 2166-2754
• DOI: 10.1116/1.4766317

The authors report on the fabrication of subsurfaced 100–600 nm wide nanochannels in fused silica with top slit openings in the size range of 5–10 nm. Such nanochannels can be used in combination with a nanofluidics system to guide molecular motors and quickly switch the chemical environment inside the nanochannels through diffusion via the top slits. To realize nanochannel top slits in this size range, the authors here demonstrate the use of a self-closing effect based on the volume expansion of a thin Si layer during oxidation. A high contrast electron beam lithography exposure step in conjunction with dry etching of SiO2 by reactive ion etching (RIE) and Si by inductively coupled plasma-RIE followed by wet etching of a fused silica substrate is used to create the initial slit before oxidation. The details of nanochannel fabrication steps are described and discussed.