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Mid-IR resonant cavity detectors
Resonant cavity detectors based on III–V materials have been designed, grown entirely by molecular beam epitaxy, fabricated, and tested. They offer a low noise (dark current densities of 0.4 mA/cm2 were measured at 298 K, close to the predicted value of 0.31 mA/cm2), narrow response detector (full w...
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Published in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2017-03, Vol.35 (2) |
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Main Authors: | , , , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Resonant cavity detectors based on III–V materials have been designed, grown entirely by molecular beam epitaxy, fabricated, and tested. They offer a low noise (dark current densities of 0.4 mA/cm2 were measured at 298 K, close to the predicted value of 0.31 mA/cm2), narrow response detector (full width at half maximum of 57 nm in GaSb and 45 nm in InAs) in the mid-infrared region, with future applications in spectroscopy, gas sensing, and optical communications. |
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ISSN: | 2166-2746 2166-2754 |
DOI: | 10.1116/1.4977780 |