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Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition
Focused soft X-ray beam induced deposition of metallic deposits from metal organic precursors is a promising novel technique for additive nanostructure fabrication. In the present work, the authors present a comparative study for deposition and in situ characterization of Co and Mn nanostructures in...
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Published in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2017-05, Vol.35 (3) |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Focused soft X-ray beam induced deposition of metallic deposits from metal organic
precursors is a promising novel technique for additive nanostructure fabrication. In the
present work, the authors present a comparative study for deposition and in
situ characterization of Co and Mn nanostructures in a scanning transmission
x-ray
microscope. The authors detect a significant selectivity of the deposition process with
respect to the incident photon energy that arises from the enhanced x-ray
absorption
cross section of the precursor molecules for near-threshold excitation. This effect has
been investigated for the L
2,3-edges of the respective metal
centers of two different precursor molecules as well as the N and O
K-edges of the respective ligands. The authors find a photon-limited
growth mode for deposition from cobalt tricarbonyl nitrosyl [Co(CO)3NO], while the process
is precursor-limited for methylcyclopentadienyl manganese tricarbonyl
[MeCpMn(CO)3] possibly due to a comparably low vapor pressure of the latter
precursor. |
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ISSN: | 2166-2746 2166-2754 |
DOI: | 10.1116/1.4979274 |