Epitaxial growth of 3C-SiC film by microwave plasma chemical vapor deposition in H2-CH4-SiH4 mixtures: Optical emission spectroscopy study

• Published in: Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2021-03, Vol.39 (2)
• Main Authors: Yurov, V. Yu, Ralchenko, V. G., Martyanov, A. K., Antonova, I. A., Sedov, V. S., Khomich, A. A., Voronov, V. V., Savin, S. S., Shevchenko, M. Y., Bolshakov, A. P.
• Format: Article
• Language: English
• ISSN: 0734-2101; 1520-8559
• DOI: 10.1116/6.0000745

Microwave (MW) plasma in silane-hydrogen and silane-hydrogen-methane mixtures is used effectively for chemical vapor deposition of Si, SiC, diamond, and SiC-diamond composite films; however, the properties of such plasma at pressures of the order of 100 Torr remain largely unexplored. Here we characterize the MW plasma (2.45 GHz) in SiH4 + H2 and SiH4 + СH4 + H2 mixtures (72 Torr) with silane content ranging from 0% to 5% in the process gas using high-resolution optical emission (OE) spectroscopy. Besides the OE lines of C2 dimer, Balmer series of excited atomic hydrogen (Hα, Hβ, Hγ, Hδ, and Hε), and CH radical, we observed atomic Si lines at 263, 288, and 391 nm and a relatively weak SiH emission. Gas temperature Tg of ≈3160 K is assessed from the rotational structure of the C2 dimer (Δν = 0, λ = 516.5 nm) emission band, and the absorbed microwave power density (MWPD) in the plasma fluctuates in the narrow range between 36 and 43 W/cm3 with a slight tendency to decrease with silane addition. The MWPD, intensity ratio Hα/Hβ of hydrogen Balmer series lines (related to excitation temperature Texc), and Si lines’ intensities in OE spectra as functions of SiH4 concentration in H2 and H2 + CH4 mixtures all show an extremum or a kink in slope near a special point at ≈0.5% SiH4. Finally, we produced a silicon carbide film of cubic polytype 3C-SiC on a (111) oriented Si substrate, which was characterized with Raman spectroscopy and x-ray diffraction, and its monocrystalline structure was confirmed.