ERRATUM: “Versailles project on advanced materials and standards interlaboratory study on intensity calibration for x-ray photoelectron spectroscopy instruments using low-density polyethylene” [J. Vac. Sci. Technol. A 38, 063208 (2020)]

• Published in: Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2021-03, Vol.39 (2)
• Main Authors: Reed, Benjamen P., Cant, David J. H., Spencer, Steve J., Carmona-Carmona, Abraham Jorge, Bushell, Adam, Herrera-Gómez, Alberto, Kurokawa, Akira, Thissen, Andreas, Thomas, Andrew G., Britton, Andrew J., Bernasik, Andrzej, Fuchs, Anne, Baddorf, Arthur P., Bock, Bernd, Theilacker, Bill, Cheng, Bin, Castner, David G., Morgan, David J., Valley, David, Willneff, Elizabeth A., Smith, Emily F., Nolot, Emmanuel, Xie, Fangyan, Zorn, Gilad, Smith, Graham C., Yasufuku, Hideyuki, Fenton, Jeffrey L., Chen, Jian, Counsell, Jonathan D. P., Radnik, Jörg, Gaskell, Karen J., Artyushkova, Kateryna, Yang, Li, Zhang, Lulu, Eguchi, Makiho, Walker, Marc, Hajdyła, Mariusz, Marzec, Mateusz M., Linford, Matthew R., Kubota, Naoyoshi, Cortazar-Martínez, Orlando, Dietrich, Paul, Satoh, Riki, Schroeder, Sven L. M., Avval, Tahereh G., Nagatomi, Takaharu, Fernandez, Vincent, Lake, Wayne, Azuma, Yasushi, Yoshikawa, Yusuke, Compean-Gonzalez, Claudia L., Ceccone, Giacomo, Shard, Alexander G.
• Format: Article
• Language: English
• Subjects: Condensed Matter; Materials Science; Physics
• ISSN: 0734-2101; 1520-8559
• DOI: 10.1116/6.0000907

We report the results of a Versailles Project on Advanced Materials and Standards interlaboratory study on the intensity scale calibration of x-ray photoelectron spectrometers using low-density polyethylene (LDPE) as an alternative material to gold, silver, and copper. An improved set of LDPE reference spectra, corrected for different instrument geometries using a quartz-monochromated Al Kα x-ray source, was developed using data provided by participants in this study. Using these new reference spectra, a transmission function was calculated for each dataset that participants provided. When compared to a similar calibration procedure using the NPL reference spectra for gold, the LDPE intensity calibration method achieves an absolute offset of ∼3.0% and a systematic deviation of ±6.5% on average across all participants. For spectra recorded at high pass energies (≥90 eV), values of absolute offset and systematic deviation are ∼5.8% and ±5.7%, respectively, whereas for spectra collected at lower pass energies (