Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti1−xAlxNy thin films

• Published in: Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2023-12, Vol.41 (6)
• Main Authors: Salamania, J., Farhadizadeh, A. F., Kwick, K. M. Calamba, Schramm, I. C., Hsu, T. W., Johnson, L. J. S., Rogström, L., Odén, M.
• Format: Article
• Language: English
• ISSN: 0734-2101; 1520-8559
• DOI: 10.1116/6.0003074

The wurtzite phase of TiAlN has been known to form in industrial grade coatings with high Al content; yet, a significant knowledge gap exists regarding its behavior at high temperatures and the impact of defects on its properties. Specifically, its response to high temperatures and the implications of defects on its characteristics are poorly understood. Here, the high-temperature decomposition of nitrogen-deficient epitaxial wurtzite Ti1−xAlxNy (x = 0.79–0.98, y = 0.82–0.86) films prepared by reactive magnetron sputtering was investigated using x-ray diffractometry and high-resolution scanning transmission electron microscopy. The results show that wurtzite Ti1−xAlxNy decomposes by forming intermediary MAX phases, which then segregate into pure c-TiN and w-AlN phases after high-temperature annealing and intermetallic TiAl nanoprecipitates. The semicoherent interfaces between the wurtzite phase and the precipitates cause age hardening of approximately 4−6 GPa, which remains even after annealing at 1200 °C. These findings provide insight into how nitrogen vacancies can influence the decomposition and mechanical properties of wurtzite TiAlN.