Effect of beam and gate offset size on x-ray focal spot resolution of a cold cathode electron beam

• Published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2024-05, Vol.42 (3)
• Main Authors: Sawant, Jaydip, Bhotkar, Ketan, Yu, Yi Yin, Park, Kyu Chang
• Format: Article
• Language: English
• ISSN: 2166-2746; 2166-2754
• DOI: 10.1116/6.0003390

In x-ray imaging, high resolution is essential, particularly in sectors such as medical and industries where the need for nondestructive defect detection is required. Previous research has shown that altering beam design and the number of gates offset holes has an impact on focal spot size (FSS). However, the specific effects of beam size and offset size were not thoroughly assessed. In the present study, the influence of beam size and gate offset size was evaluated by utilizing a cold cathode electron beam. Various beam sizes were employed to achieve a small FSS, and subsequently, the smallest beam was utilized to examine the impact of gate offset size. In doing so, the smallest FSS of 0.25 mm vertical and 0.33 mm horizontal was attained without the utilization of any additional focusing lens. This illustrates that by adjusting the beam size and gate offset size, it is possible to attain a small FSS, facilitating the development of an economically viable x-ray imaging beam.