Modeling of surface metrology of state-of-the-art x-ray mirrors as a result of stochastic polishing process

The design and evaluation of the expected performance of optical systems requires sophisticated and reliable information about the surface topography of planned optical elements before they are fabricated. The problem is especially severe in the case of x-ray optics for modern diffraction-limited-el...

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Bibliographic Details
Published in:Optical engineering 2016-07, Vol.55 (7), p.074106-074106
Main Authors: Yashchuk, Valeriy V, Tyurin, Yury N, Tyurina, Anastasia Y
Format: Article
Language:English
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Summary:The design and evaluation of the expected performance of optical systems requires sophisticated and reliable information about the surface topography of planned optical elements before they are fabricated. The problem is especially severe in the case of x-ray optics for modern diffraction-limited-electron-ring and free-electron-laser x-ray facilities, as well as x-ray astrophysics missions, such as the X-ray Surveyor under development. Modern x-ray source facilities are reliant upon the availability of optics of unprecedented quality, with surface slope accuracy
ISSN:0091-3286
1560-2303
DOI:10.1117/1.OE.55.7.074106