Enabling precision coordinate metrology for universal optical testing and alignment applications (Erratum)

This erratum corrects the units in parts (a) and (b) of Fig. 56.

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Bibliographic Details
Published in:Optical engineering 2021-04, Vol.60 (4), p.049801-049801
Main Authors: Khreishi, Manal, Ohl, Raymond G, Howard, Joseph M, Papa, Jonathan C, McClelland, Ryan, Hovis, Clark, Hadjimichael, Theodore, Thompson, Patrick, Ranson, Kenneth, Liang, Rongguang, Gorius, Nicolas
Format: Article
Language:English
Online Access:Get full text
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Description
Summary:This erratum corrects the units in parts (a) and (b) of Fig. 56.
ISSN:0091-3286
1560-2303
DOI:10.1117/1.OE.60.4.049801