High-speed determination of the thickness and spectral ellipsometry investigation of films produced by the thermal oxidation of InP and VxOy/InP structures

Spectral ellipsometry was used to determine the thickness and optical properties of films produced by the thermal oxidation of InP and V x O y /InP structures. Comparison of the measured optical characteristics and thickness of nanofilms with high-speed ellipsometric analysis data indicates that the...

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Bibliographic Details
Published in:Inorganic materials 2013, Vol.49 (2), p.179-184
Main Authors: Mittova, I. Ya, Shvets, V. A., Tomina, E. V., Sladkopevtsev, B. V., Tret’yakov, N. N., Lapenko, A. A.
Format: Article
Language:English
Subjects:
Chemistry
Chemistry and Materials Science
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Materials Science
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Summary:Spectral ellipsometry was used to determine the thickness and optical properties of films produced by the thermal oxidation of InP and V x O y /InP structures. Comparison of the measured optical characteristics and thickness of nanofilms with high-speed ellipsometric analysis data indicates that the two methods should be used in the case of multicomponent films. Absorption in such films is shown to be due, among other factors, to the presence of unoxidized indium, which influences the optical properties of the film and the ellipsometric measurement results.
ISSN:0020-1685
1608-3172
DOI:10.1134/S0020168513020143