X-ray fluorescence analysis of Ge1–xSex, As1–xSex, and Ge1–x–yAsySex glasses using electronic excitation

X-ray fluorescence analysis with fluorescence excitation by an electron beam with an energy of 30 kV is applied to determine the germanium, arsenic, and selenium contents in Ge 1– x Se x , As 1– x Se x , and Ge 1– x – y As y Se x glassy alloys. Using calibration dependences, the quantitative composi...

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2015-10, Vol.49 (10), p.1352-1356
Main Authors: Terukov, E. I., Seregin, P. P., Marchenko, A. V., Zhilina, D. V., Bobokhuzhaev, K. U.
Format: Article
Language:English
Subjects:
Amorphous
Magnetic Materials
Magnetism
Organic Semiconductors
Physics
Physics and Astronomy
Vitreous
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Summary:X-ray fluorescence analysis with fluorescence excitation by an electron beam with an energy of 30 kV is applied to determine the germanium, arsenic, and selenium contents in Ge 1– x Se x , As 1– x Se x , and Ge 1– x – y As y Se x glassy alloys. Using calibration dependences, the quantitative composition of the glasses is determined with an accuracy of ±0.0002 for parameters x and y in a surface layer ~0.1 µm deep.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782615100255